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Omnivision BSI Backside Implant Optimizations

Omnivision BSI pixel uses P+ backside implant to passivate the backside surface. The recently published WO/2009/099491 patent application gives some details of its optimization process. The figure below shows the location of the backside P+ implant 220:


First, Omnivision optimizes the P+ layer depth, making few implants with different energies:

The sensitivity for the different depths is shown below:


Next step is the optimization of the P+ implant dosage. The three tested dosages are shown here:


The pixel sensitivity vs dosage is shown below:

One more step is optimization of the silicon layer thickness:


Omnivision BSI Backside Implant Optimizations Omnivision BSI Backside Implant Optimizations Reviewed by MCH on October 11, 2009 Rating: 5

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