i-Micronews reports that ST published an article on 3MP BSI sensor with 1.45um pixel pitch. The original article is published in Advanced Substrate News.
The senor process is SOI based. The article has B&W image of resolution chart and also B&W QE graph showing about 65-70% QE in blue going down to 30-40% in red. ST reports dark current of 1e/s at 25C. Conversion gain, image lag and temporal noise are said to be comparable with regular frontside sensors. The work was helped by Tracit (wafer bonding and thinning) and CEA-LETI-MINATEC.
Unfortunately, neither color images nor color QE graphs are presented. Without this it's quite hard to estimate the real performance of ST's BSI sensor.
The senor process is SOI based. The article has B&W image of resolution chart and also B&W QE graph showing about 65-70% QE in blue going down to 30-40% in red. ST reports dark current of 1e/s at 25C. Conversion gain, image lag and temporal noise are said to be comparable with regular frontside sensors. The work was helped by Tracit (wafer bonding and thinning) and CEA-LETI-MINATEC.
Unfortunately, neither color images nor color QE graphs are presented. Without this it's quite hard to estimate the real performance of ST's BSI sensor.
ST Publishes BSI Sensor Paper
Reviewed by MCH
on
July 18, 2008
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