Dave Etchells from Imaging Resource publishes a nice overview of Sony image sensor fab. It describes a process of growing the silicon boules by Czochralski method in great details, then gets sketchy on photolitography and other FEOL and BEOL steps, then again goes into much more details on dicing, wire bonding, and packaging. While very simplistic, the article describes quite a complete process flow at Sony Kumamoto fab.
Sony Fab Tour
Reviewed by MCH
on
September 05, 2017
Rating:
Reviewed by MCH
on
September 05, 2017
Rating:
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