Chipworks published a nice explanation of SCM technique - an extremely useful tool for process and pixel debug and analysis.
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| SCM images of CMOS image sensor samples; (left) plan view of a shallow bevel and (right) cross-sectional view. |
Chipworks Explains SCM Measurements
Reviewed by MCH
on
January 21, 2013
Rating:
Reviewed by MCH
on
January 21, 2013
Rating:
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